Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183358 | Energy filter element for ion implantation systems for the use in the production of wafers | Constantin CSATO | 2021-11-23 |
| 11056309 | Method and device for implanting ions in wafers | Constantin CSATO | 2021-07-06 |