Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11059974 | Silicon carbonaceous film forming composition comprising polycarbosilane and method for manufacturing silicon carbonaceous film using the same | — | 2021-07-13 |
| 11059995 | Film forming composition | Go Noya, Masahiko Kubo, Noboru Satake, Yoshio Nojima, Yuki Ozaki | 2021-07-13 |
| 10913852 | Siloxazane compound and composition comprising the same, and method for producing silceous film using the same | Naotaka Nakadan, Bertram Barnickel, Rikio KOZAKI, Naoko Nakamoto | 2021-02-09 |