Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195704 | Pedestal assembly for plasma processing apparatus | Martin L. Zucker | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195704 | Pedestal assembly for plasma processing apparatus | Martin L. Zucker | 2021-12-07 |