Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903042 | Apparatus and method for inspecting a sample using a plurality of charged particle beams | Aernout Christiaan Zonnevylle, Yan Ren | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903042 | Apparatus and method for inspecting a sample using a plurality of charged particle beams | Aernout Christiaan Zonnevylle, Yan Ren | 2021-01-26 |