Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10987705 | Method and system for the removal and/or avoidance of contamination in charged particle beam systems | Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard | 2021-04-27 |