Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101099 | Charged particle blocking element, exposure apparatus comprising such an element, and method for using such an exposure apparatus | Derk Ferdinand WALVOORT | 2021-08-24 |
| 11094426 | Vacuum chamber arrangement for charged particle beam generator | Willem Henk Urbanus, Marco Jan-Jaco Wieland | 2021-08-17 |