YS

Yoshitomo Sato

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #198,033 of 548,734Top 40%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11094569 Substrate processing apparatus 2021-08-17