Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156774 | Optical component and method for the production thereof | Roman Ostholt, Daniel Dunker, Malte Schulz-Ruhtenberg, Arne Schnoor, Tobias Jaus | 2021-10-26 |
| 11072041 | Method for producing a technical mask | Roman Ostholt, Arne Schnoor, Daniel Dunker, Kevin M. Hale, Moritz Doerge +1 more | 2021-07-27 |
| 11065716 | Method for processing, in particular separating, a substrate by means of laser-induced deep reactive etching | Roman Ostholt, Daniel Dunker, Arne Schnoor | 2021-07-20 |