Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189496 | Plasma reactor for ultra-high aspect ratio etching and etching method thereof | Gerald Yin, Yichuan Zhang, Jie Liang, Tuqiang Ni | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189496 | Plasma reactor for ultra-high aspect ratio etching and etching method thereof | Gerald Yin, Yichuan Zhang, Jie Liang, Tuqiang Ni | 2021-11-30 |