TS

Tighe A. Spurlin

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #231,090 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11208732 Monitoring surface oxide on seed layers during electroplating Ludan Huang, Lee J. Brogan, Shantinath Ghongadi, Jonathan D. Reid, Manish Ranjan +2 more 2021-12-28