Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004662 | Temperature controlled spacer for use in a substrate processing chamber | Taide Tan, Huatan Qiu | 2021-05-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004662 | Temperature controlled spacer for use in a substrate processing chamber | Taide Tan, Huatan Qiu | 2021-05-11 |