Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088012 | Wafer susceptor apparatus with thermal insulation and method for manufacturing the same | Junichi Arami | 2021-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088012 | Wafer susceptor apparatus with thermal insulation and method for manufacturing the same | Junichi Arami | 2021-08-10 |