Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964550 | Method and apparatus for surface planarization of object using light source of specific wavelength and reactive gas | Il Ki Han, S. Joon KWON, Young Hwan Kim, Hyungduk KO, Chun Keun Kim | 2021-03-30 |