Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118285 | Method of evaluating cleanliness, method of determining cleaning condition, and method of manufacturing silicon wafer | Hirokazu Kato | 2021-09-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118285 | Method of evaluating cleanliness, method of determining cleaning condition, and method of manufacturing silicon wafer | Hirokazu Kato | 2021-09-14 |