Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152024 | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration | Shinobu Hagiya, Hiroyasu Tsuchida, Tzong-Shii Pan, Yoshinobu Noguchi | 2021-10-19 |