Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119404 | System and method for reducing printable defects on extreme ultraviolet pattern masks | Xiaochun Yang, Vikram Tolani | 2021-09-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119404 | System and method for reducing printable defects on extreme ultraviolet pattern masks | Xiaochun Yang, Vikram Tolani | 2021-09-14 |