Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209373 | Six degree of freedom workpiece stage | — | 2021-12-28 |
| 11121019 | Slotted electrostatic chuck | Haoran Jiang | 2021-09-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209373 | Six degree of freedom workpiece stage | — | 2021-12-28 |
| 11121019 | Slotted electrostatic chuck | Haoran Jiang | 2021-09-14 |