Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183393 | Atomic layer etching using acid halide | Korehito KATO, Katsuya Fukae | 2021-11-23 |
| 10899615 | Feeding process of chlorine fluoride | Korehito KATO, Yoshimasa SAKURAI, Hiroki Takizawa, Sho Kikuchi, Shinichi Kawaguchi +2 more | 2021-01-26 |