Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D924823 | Adiabatic plate for substrate processing apparatus | Makoto Tsuri | 2021-07-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D924823 | Adiabatic plate for substrate processing apparatus | Makoto Tsuri | 2021-07-13 |