Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124894 | Vapor phase growth apparatus and vapor phase growth method | Hideshi TAKAHASHI, Hideki Ito, Takanori HAYANO | 2021-09-21 |
| 11047047 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Hideshi TAKAHASHI | 2021-06-29 |
| 10920317 | Shower head, vapor phase growth apparatus and vapor phase growth method | Takumi YAMADA | 2021-02-16 |