Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211229 | Processing method and plasma processing apparatus | Sho OIKAWA, Seiji Yokoyama, Shunichi Kawasaki | 2021-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211229 | Processing method and plasma processing apparatus | Sho OIKAWA, Seiji Yokoyama, Shunichi Kawasaki | 2021-12-28 |