Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152470 | Method for manufacturing semiconductor device, method for manufacturing substrate, semiconductor device, substrate, and manufacturing apparatus of substrate | Chiharu Ota, Ryosuke Iijima | 2021-10-19 |
| 10998401 | Semiconductor device having a base body of silicon carbide | Chiharu Ota, Ryosuke Iijima | 2021-05-04 |
| 10930732 | Semiconductor device including a silicon carbide layer | Mitsuhiro Kushibe, Tatsuo Shimizu | 2021-02-23 |