Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133202 | Substrate heating apparatus with enhanced temperature uniformity characteristic | Chul Ho JUNG, Jin Young Choi | 2021-09-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133202 | Substrate heating apparatus with enhanced temperature uniformity characteristic | Chul Ho JUNG, Jin Young Choi | 2021-09-28 |