Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133191 | Method of producing etching mask, etching mask precursor, and oxide layer, and method of manufacturing thin film transistor | Satoshi Inoue, Tatsuya Shimoda, Kiyoshi Nishioka, Nobutaka Fujimoto, Masahiro Suzuki | 2021-09-28 |