Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031269 | Substrate transport robot, substrate transport system, and substrate transport method | Junichi Matsuoka, Tomokazu Arita | 2021-06-08 |
| 10947860 | Actuator | — | 2021-03-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031269 | Substrate transport robot, substrate transport system, and substrate transport method | Junichi Matsuoka, Tomokazu Arita | 2021-06-08 |
| 10947860 | Actuator | — | 2021-03-16 |