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Home › Inventors › Shuhei YABU
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Shuhei YABU

HHHitachi High-Technologies: 1 patents #146 of 381Top 40%
Overall (2021): #258,841 of 548,734Top 50%
1 Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10910194 Charged particle beam device and optical-axis adjusting method thereof — 2021-02-02

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