Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957564 | Self-calibration apparatus and method for real-time temperature measurement system of MOCVD device | Chengmin Li, Dong Yan, Jianpeng Liu, Hongda Jiao, TANG-HONG ZHANG +1 more | 2021-03-23 |
| 10908024 | Apparatus and method for online and real-time detection of temperature of epitaxial wafer | Dong Yan, Chengmin Li, Jianpeng Liu, Longmao Ye | 2021-02-02 |