Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195733 | Operation method of vacuum processing device | Ryoichi Isomura, Takahiro Sakuragi | 2021-12-07 |
| D907593 | Discharge chamber for a plasma processing apparatus | Nobuhide Nunomura | 2021-01-12 |