Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131928 | Resist underlayer film forming composition which contains compound having glycoluril skeleton as additive | Yuki Usui, Takahiro Kishioka, Yasushi Sakaida | 2021-09-28 |
| 11112696 | Protective film-forming composition | Yuto HASHIMOTO, Hikaru TOKUNAGA, Tomoya Ohashi, Yasushi Sakaida, Takahiro Kishioka | 2021-09-07 |
| 11003078 | Compositions for forming a protective film against basic aqueous hydrogen peroxide solution, and pattern formation method | Tomoya Ohashi, Yuto HASHIMOTO, Yuki Usui, Yasushi Sakaida, Takahiro Kishioka | 2021-05-11 |