Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10915030 | Light-spot distribution structure, surface shape measurement method, and method for calculating exposure field-of-view control value | — | 2021-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10915030 | Light-spot distribution structure, surface shape measurement method, and method for calculating exposure field-of-view control value | — | 2021-02-09 |