Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11097320 | FOUP cleaning device and FOUP cleaning method | Oh Hyeong Kweon, Dong Keun Jung, Dong Geun Hur | 2021-08-24 |
| 10900142 | Apparatus for manufacturing a second substrate on a first substrate including removal of the first substrate | Sam Mook KANG, Jun-youn Kim, Young-jo Tak, Mi Hyun Kim | 2021-01-26 |