Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145520 | Method for treating substrate involving supplying treatment liquid to peripheral area of substrate by second nozzle | Eui Sang Lim | 2021-10-12 |
| 11020777 | Substrate treating apparatus | Eui Sang Lim, Jae-Myoung Lee | 2021-06-01 |
| 11024517 | Apparatus and transfer unit which measures weight remaining on a substrate | Jae-Myoung Lee | 2021-06-01 |