Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163144 | Focusing of optical devices | Mihail Mihaylov, Jae-myung Ryu | 2021-11-02 |
| 11112234 | Multi-probe gauge for slab characterization | — | 2021-09-07 |
| 11105611 | Non-contact measurement of a stress in a film on substrate | Wei-Chun Hung, Raphael Morency | 2021-08-31 |
| 11073372 | Multi-probe gauge for slab characterization | — | 2021-07-27 |
| 10964730 | Non-contact measurement of a stress in a film on a substrate | Oanh Nguyen | 2021-03-30 |
| 10935777 | Focusing of optical devices | Mihail Mihaylov, Jae-myung Ryu | 2021-03-02 |
| 10890434 | Inspecting a multilayer sample | — | 2021-01-12 |