Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11176307 | Method and system for pattern configuration | Been-Der Chen | 2021-11-16 |
| 11003093 | Process variability aware adaptive inspection and metrology | Vivek Jain, Stefan Hunsche | 2021-05-11 |