Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927460 | Raw material for forming thin film, and method for manufacturing thin film | Hiroki Sato, Naoki Yamada, Haruyoshi Sato | 2021-02-23 |
| 10913754 | Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound | Gyu-hee Park, Youn Soo Kim, Jae-Soon Lim, Youn-Joung Cho, Kazuki HARANO +2 more | 2021-02-09 |
| 10900119 | Tungsten precursor and method of forming Tungsten containing layer using the same | Soyoung Lee, Jaesoon Lim, Jieun Yun, Akio Saito, Yutaro Aoki | 2021-01-26 |