TK

Tadayoshi Kawaguchi

HH Hitachi High-Technologies: 2 patents #62 of 381Top 20%
Overall (2021): #107,526 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11094509 Plasma processing apparatus Makoto Satake, Kenetsu Yokogawa, Takamasa Ichino 2021-08-17
10998168 Plasma processing apparatus Yusaku Sakka, Ryoji Nishio 2021-05-04