Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079686 | Excimer laser apparatus and electronic-device manufacturing method | Keisuke Ishida, Masato Moriya, Natsuhiko KOUNO, Takashi KUSAMA | 2021-08-03 |
| 10971886 | Laser apparatus | Hiroyuki Masuda | 2021-04-06 |
| 10965090 | Laser apparatus | — | 2021-03-30 |