Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971390 | Methods of minimizing wafer backside damage in semiconductor wafer processing | Abdul Aziz Khaja, Liangfa Hu, Ganesh Balasubramanian | 2021-04-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971390 | Methods of minimizing wafer backside damage in semiconductor wafer processing | Abdul Aziz Khaja, Liangfa Hu, Ganesh Balasubramanian | 2021-04-06 |