Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069545 | Substrate processing apparatus, temperature control method, and temperature control program | — | 2021-07-20 |
| 11049743 | Substrate processing apparatus, flow rate control method, and storage medium storing flow rate control program | — | 2021-06-29 |
| 10892144 | Plasma processing apparatus, monitoring method, and monitoring program | — | 2021-01-12 |