Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916421 | Method of manufacturing epitaxial silicon wafers | Jun Yamamoto | 2021-02-09 |
| 10881881 | Rotary irradiation apparatus, rotary irradiation method, and rotation radiotherapy apparatus | Tomoyuki Nonaka, Tomofumi Orikasa | 2021-01-05 |