Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195725 | Dry etch process landing on metal oxide etch stop layer over metal layer and structure formed thereby | Michael Hans Enzelberger-Heim, Reiner Port | 2021-12-07 |
| 11069530 | Etching platinum-containing thin film using protective cap layer | Helmut Rinck, Mike Mittelstaedt | 2021-07-20 |
| 11040934 | Preparation of 2,5,6-trihydroxy-3-hexenoic acid and 2,5-dihydroxy-3-pentenoic acid and esters thereof from C6 and C5 sugars | Esben Taarning, Irantzu Sadaba Zubiri | 2021-06-22 |
| 11011381 | Patterning platinum by alloying and etching platinum alloy | Helmut Rinck | 2021-05-18 |