Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199769 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology | Rangarajan Jagannathan | 2021-12-14 |
| 11048162 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology | Allen R. Kirkpatrick | 2021-06-29 |
| 11004692 | Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology | Richard C. Svrluga | 2021-05-11 |
| 10971324 | Treatment method for inhibiting platelet attachment and articles treated thereby | Joseph Khoury, Michael J. Walsh, James G. Bachand, Allen R. Kirkpatrick | 2021-04-06 |