Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171033 | Substrate placing table | Atsushi Tanaka | 2021-11-09 |
| 11083533 | Manipulator system and operating method thereof | Keigo Takahashi, Kosuke KISHI | 2021-08-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171033 | Substrate placing table | Atsushi Tanaka | 2021-11-09 |
| 11083533 | Manipulator system and operating method thereof | Keigo Takahashi, Kosuke KISHI | 2021-08-10 |