Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11096266 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2021-08-17 |
| 10904993 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | John Tom Stewart, IV, Andrew David LaForge | 2021-01-26 |