Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004692 | Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology | Sean R. Kirkpatrick | 2021-05-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004692 | Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology | Sean R. Kirkpatrick | 2021-05-11 |