Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164768 | Process-induced displacement characterization during semiconductor production | Pradeep Vukkadala, Mark D. Smith, Ady Levy, Dieter Mueller | 2021-11-02 |
| 11049720 | Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films | Dieter Mueller, Xiaomeng Shen, Jason Saito | 2021-06-29 |