Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195705 | Plasma generating unit and substrate treating apparatus comprising the same | Junghwan Lee, Jong Hwan An, Shin-Woo Nam | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195705 | Plasma generating unit and substrate treating apparatus comprising the same | Junghwan Lee, Jong Hwan An, Shin-Woo Nam | 2021-12-07 |