Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054736 | Extreme ultraviolet (EUV) mask for lithography and associated methods | Woon-hyuk Choi | 2021-07-06 |
| 10962874 | Methods of manufacturing semiconductor devices, method sof performing extreme ultraviolet ray exposure, and methods of performing optical proximity correction | Akio Misaka, Ki-Soo Kim | 2021-03-30 |
| 10908498 | Optical proximity correction method and method of manufacturing mask by using the same | Ki-Soo Kim | 2021-02-02 |