Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079220 | Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance | — | 2021-08-03 |
| 10883924 | Metallic gratings and measurement methods thereof | Sam O' Mullane, Alain C. Diebold, Brennan Peterson | 2021-01-05 |