Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955360 | Structured illumination-based inspection apparatus and inspection method, and semiconductor device fabrication method including structured illumination-based inspection method | Ken Ozawa, Wook Kim, Gwang Sik Park, Ji Hoon Kang, Kwang Soo Kim | 2021-03-23 |